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Canon delivers first nanoimprint lithography tool to US institute backed by Intel, Samsung, DARPACanon made quite a splash last year when it introduced its first nanoimprint lithography (NIL) machine that can be used to ...
Canon on Oct. 18 unveiled the lithography system, which uses new “nanoimprint” technology, during an exhibition in Yokohama to showcase its technologies. Fujio Mitarai, Canon’s chairman and ...
The integration of NSL with other nanofabrication techniques, such as nanoimprint lithography and self-assembly, will enable the creation of hybrid nanopatterning processes with enhanced capabilities.
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