The source emits a laser beam which hits the beam splitter ... The schematic view of our setup is as follows: We need the piezo driver to amplify the voltage sent to the piezo; our circuit can't ...
including an integrated laser driver, an updated RX front-end optimized for optical signaling, and a non-linear DSP equalization that corrects for both static and dynamic nonlinearity components.
LLNL maintains that this could lead to a next-generation “beyond EUV” (BEUV) lithography system producing chips that are smaller, more powerful, and faster to manufacture while using less electricity.