ELMIC aims to advance the basic science driving the integration of new materials and processes into future microelectronic ...

Led by Lawrence Livermore National Laboratory (LLNL), the project aims for the next evolution of EUV lithography, centered ...

According to Cymer, this set-up has twice the conversion efficiency of other laser–fuel combinations. Figure 3: EUV sources for lithography applications based on laser- (left) or discharge ...

The Russian semiconductor initiative is led by Nikolay Chkhalo from the Russian Academy of Sciences’ Institute of ...

The Elionix ELS-G100 electron beam lithography system produces a highly stable beam with a diameter as small ... It’s high-rigidity stage enables beam positioning resolution of 0.1nm. A laser ...

One of the most complex parts of this process is lithography: the step in which shapes are drawn onto a silicon wafer. There are several ways to do this, all of them rather complicated ...

The UV excimer laser is one of the most precise industrial processing tools on the market and has many applications, of which eye surgery and semiconductor lithography are perhaps the best known.

DIY photolithography using a direct write laser machine. This is a maskless technique (similar to projection lithography) to ...

Rapidus installing ASML's EUV lithography equipment at its Innovative Integration for Manufacturing (IIM-1) foundry.

Scanning probe lithography (SPL) offers a solution for nanofabrication, but each type of SPL has its unique application ...

EUV lithography plays an essential role for advancing the manufacturing of smaller transistors ... The need for high energy ...