One of the most complex parts of this process is lithography: the step in which shapes are drawn onto a silicon wafer. There are several ways to do this, all of them rather complicated ...
The Elionix ELS-G100 electron beam lithography system produces a highly stable beam with a diameter as small ... It’s high-rigidity stage enables beam positioning resolution of 0.1nm. A laser ...
The UV excimer laser is one of the most precise industrial processing tools on the market and has many applications, of which eye surgery and semiconductor lithography are perhaps the best known.
Decades of cutting-edge laser, optics and plasma physics research at Lawrence Livermore National Laboratory (LLNL) played a key role in the underlying ...
Russia has unveiled a roadmap to develop its own lithography machines, aiming to create less costly and complex equipment than ASML's systems, according to CNews. These machines will use lasers ...