As China strides to build a self-sufficient semiconductor industry, it has to develop not only sophisticated chipmaking tools ...
To speed up the TPL process, highly sensitive photoresists are essential. To date, the classic SU-8 epoxy photoresist series ...
Samsung Electronics has reportedly reduced its use of thick photoresist (PR) in the photolithography process for its latest 3D NAND flash, achieving significant cost savings. This move ...
Although the US and Dutch governments have banned ASML from selling extreme ultraviolet (EUV) and advanced deep ultraviolet (DUV) lithography equipment to China, sales and after-sales services to ...
Digital photo and scanning electron microscope of a transparent hybrid photoresist film of titanium dioxide nanoparticle-embedded acrylic resin with thickness of 29 μm Credit must be given to the ...
The process starts with the substrate being coated with a light-sensitive photoresist. A photomask, which contains the desired pattern, is then aligned above the substrate. Ultraviolet (UV) light is ...