ASML Holding N.V. (NASDAQ:ASML) is one of the most pivotal companies in the global technology ecosystem. As a leading semiconductor equipment manufacturer, its cutting-edge lithography systems are ...
Extreme-ultraviolet (EUV) lithography at 13.5 nm is expected to be introduced in high-volume semiconductor chip production over the next three years. Research is now underway to investigate sub-10 ...
Abstract: Deep-UV (DUV) lithography has been developed to scale minimum feature sizes of devices on semiconductor chips to sub-half-micron dimensions. This paper reviews early manufacturing ...