The making of a microchip is a multistep process. The silicon ingot is first sliced into wafers, which are then cleaned and heated to create a durable silicon dioxide coating. The thin wafers are then ...

Feature sizes decreasing to the nanometer range, the increasing need for low defect densities, increasing chip density and size, along with larger diameter wafers have challenged the industry to ...

Their study was published in Laser & Photonics Reviews. Photolithography plays a crucial role in the manufacture of ...