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8100系列高精度硅谐振压力传感器
8000系列是GE采用世界前沿的TERPS技术而研发出的产品。TERPS是沟槽刻蚀硅谐振压力传感器技术,和现有的压力测量技术相比。它可提供更高等级的精度和稳定性。此外,TERPS技术还将压力量程扩展到更高的范围,并通过引入真正的介质隔离结构极大程度地提高了 ...
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