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US lab to explore ‘beyond EUV’ lithography to produce powerful semiconductors faster
The project aims for the next evolution of EUV lithography, centered around the lab-developed driver system named the Big ...
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LLNL to Lead Next-Gen EUV Lithography Research
Decades of cutting-edge laser, optics and plasma physics research at Lawrence Livermore National Laboratory (LLNL) played a key role in the underlying ...