The UV excimer laser is one of the most precise industrial processing tools on the market and has many applications, of which eye surgery and semiconductor lithography are perhaps the best known.
Decades of cutting-edge laser, optics and plasma physics research at Lawrence Livermore National Laboratory (LLNL) played a key role in the underlying ...
The Elionix ELS-G100 electron beam lithography system produces a highly stable beam with a diameter as small ... It’s high-rigidity stage enables beam positioning resolution of 0.1nm. A laser ...
Their study is published in the journal Laser and Photonics Reviews ... such as imaging, semiconductor lithography, material science and medical therapies. Typically, such beams are derived ...