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and substrate holder with backside gas cooling and rotation. Etch rate is 320 A/min of SiO2 with +/- 2% uniformity. These systems feature a uniquely designed milling (dry etching) platform which ...

You can create a release to package software, along with release notes and links to binary files, for other people to use. Learn more about releases in our docs.

1 Department Mechanical Systems Engineering, Tokai University, Hiratuka, Japan 2 Department Mechanical Systems Engineering (Former Student), Tokai University, Hiratuka, Japan This study investigates ...

The federal government is banning a toxic dry-cleaning chemical, leading people to wonder whether it’s safe to dry clean their clothes. The chemical in question is perchloroethylene, commonly ...

Department of Physics, Carnegie Mellon University, Pittsburgh, Pennsylvania 15213, United States Department of Physics and Astronomy, University of Pittsburgh, Pittsburgh, Pennsylvania 15260, United ...

More good news is coming to inflation-weary drivers: Gas prices are expected to drop in 2025 for the third straight year, according to GasBuddy projections shared exclusively with CNN. GasBuddy ...

Institute of Next-Generation Semiconductor Convergence Technology, Daegu Gyeongbuk Institute of Science and Technology (DGIST), Daegu 42988, Republic of Korea ...

Persistent Link: https://ieeexplore.ieee.org/servlet/opac?punumber=7361 ...